SIO-300 series: Integrated 300mm Process Tools, Oven, FTIR Wafer Inspection Tool
產品型號：SIO-300 series: Integrated 300mm Process Tools, Ov
產品分類：自動化設備/產業機械 / 自動化設備 / 自動化機械之週邊設備
產品特色
FTIR-300 Defect Review Tool
Wafer富氏光學紅外線檢測系統(FTIR)自動化設備。可應用300mmWafer。結合光學檢測系統 (FTIR)，晶圓定位機 (Pre-Aligner)等設備,及傳送系統，展現自動化的安全性與便利性。
將FOUP置放於FOUP Opener上透過電腦程式控制，Robot將FOUP內的300mm晶圓載出至Aligner 作中心定位後，再將其傳送至光學量測系統作量測，量測完後又將晶圓載入FOUP內。
SIO 300 Oven Tool
The Oven system has integrated mini-enviroment, 300mm load ports, wafer robot, cassette robot, YES series oven and control unit
200mm cassette manual/auto load available
Wide operating range: ambient~450 degree
Full automatic
Friendly operational interface.
Class 10.
N2 bake oven
SECSI/SECSII
Wafer and Robotic arm protrusion detection
Main controller: IPC
OS: Win XP professional
Modular design minimizes adjustments, maintenance and downtime.
Shipping Cassette Handler
產品規格
FTIR-300 Defect Review Tool
Fortrend EFEM solution
Automatic 300mm wafer inspecting tool
SIO 300 Oven Tool
The Oven system has integrated mini-enviroment, 300mm load ports, wafer robot, cassette robot, YES series oven and control unit
200mm cassette manual/auto load available
Wide operating range: ambient~450 degree
Full automatic
Friendly operational interface.
Class 10.
N2 bake oven
SECSI/SECSII
Wafer and Robotic arm protrusion detection
Main controller: IPC
OS: Win XP professional
Modular design minimizes adjustments, maintenance and downtime.
Shipping Cassette Handler
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